Structural materials for NEMS/MEMS devices

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Autoria(s): Huang, H.; Wu, Q.; Winchester, K. J.; Suvorova, A.; Dell, J. M.; Zou, J.; Faraone, L.

Contribuinte(s)	C. Jagadish G. Q. Lu
Data(s)	01/01/2006
Identificador	http://espace.library.uq.edu.au/view/UQ:104011
Idioma(s)	eng
Publicador	IEEE
Palavras-Chave	#E1 #291804 Nanotechnology #671499 Instrumentation not elsewhere classified
Tipo	Conference Paper