Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV

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Autoria(s): Hong, Y. D.; Yan, J.; Wong, K.; Yeow, T.Y.T.; Chim, W-K.

Contribuinte(s)	R. Huang M. Yu J. Liou T. Hiramoto C. Claeys
Data(s)	01/01/2004
Identificador	http://espace.library.uq.edu.au/view/UQ:100362
Idioma(s)	eng
Publicador	IEEE Press
Palavras-Chave	#E1 #290902 Integrated Circuits #671201 Integrated circuits and devices
Tipo	Conference Paper