Spreading resistance analysis for silicon layers with nonuniform resistivity /


Autoria(s): Dickey, David H.; Ehrstein, James R.; United States. National Bureau of Standards. Special publication.
Data(s)

14/11/1979

Resumo

"Issued May 1979."

"This activity was supported by the Defense Advanced Research Projects Agency."

Mode of access: Internet.

Formato

bib

bib

Identificador

http://hdl.handle.net/2027/mdp.39015077586512

http://hdl.handle.net/2027/uc1.31210023555640

Idioma(s)

eng

Publicador

Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. G.P.O.,

Direitos

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Palavras-Chave #Silicon #Electric resistance, Spreading. #Semiconductors
Tipo

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