Semiconductor measurement technology:
Resumo |
Title varies slightly. Mode of access: Internet. Continued by: United States. Institute for Applied Technology. Electronic Technology Division. Semiconductor measurement technology: progress report. |
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Formato |
bib bib bib bib bib |
Identificador |
http://hdl.handle.net/2027/mdp.39015086500033 http://hdl.handle.net/2027/uc1.31822011502580 http://hdl.handle.net/2027/uc1.31822012090239 |
Idioma(s) |
eng |
Publicador |
[Washington] U.S. Dept. of Commerce, National Bureau of Standards; [for sale by the Supt. of Docs., U.S. Govt. Print. Off.] |
Relação |
Methods of measurement for semiconductor materials, process control, and devices. Quarterly report Semiconductor measurement technology: progress report |
Direitos |
Items in this record are available as Public Domain, Google-digitized. View access and use profile at http://www.hathitrust.org/access_use#pd-google. Please see individual items for rights and use statements. |
Palavras-Chave | #Semiconductors |
Tipo |
text |