Characterization of a Mo/Au thermometer for ATHENA
Data(s) |
2013
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Resumo |
The first dark characterization of a thermometer fabricated with our Mo/Au bilayers to be used as a transition edge sensor is presented. High-quality, stress-free Mo layers, whose thickness is used to tune the critical temperature (TC ) down to 100 mK, are deposited by sputtering at room temperature (RT ) on Si3N4 bulk and membranes, and protected from degradation with a 15-nm sputtered Au layer. An extra layer of high-quality Au is deposited by ex situ e-beam to ensure low residual resistance. The thermometer is patterned on a membrane using standard photolithographic techniques and wet etching processes, and is contacted through Mo paths, displaying a sharp superconducting transition (α ≈ 600). Results show a good coupling between Mo and Au layers and excellent TC reproducibility, allowing to accurately correlate dM o and TC . Since dAu is bigger than ξM for all analyzed samples, bilayer residual resistance can be modified without affecting TC . Finally, first current to voltage measurements at different temperatures are measured and analyzed, obtaining the corresponding characterization parameters. |
Formato |
application/pdf |
Identificador | |
Idioma(s) |
eng |
Relação |
http://oa.upm.es/25854/1/INVE_MEM_2013_161120.pdf http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=6392880 info:eu-repo/semantics/altIdentifier/doi/10.1109/TASC.2012.2236140 |
Direitos |
http://creativecommons.org/licenses/by-nc-nd/3.0/es/ info:eu-repo/semantics/openAccess |
Fonte |
IEEE Transactions on Applied Superconductivity, ISSN 1051-8223, 2013, Vol. 23, No. 3 |
Palavras-Chave | #Telecomunicaciones |
Tipo |
info:eu-repo/semantics/article Artículo PeerReviewed |