High-density metallic nano-emitter arrays and their field emission characteristics
Data(s) |
2014
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Resumo |
We report the fabrication and field emission properties of high-density nano-emitter arrays with on-chip electron extraction gate electrodes and up to 106 metallic nanotips that have an apex curvature radius of a few nanometers and a the tip density exceeding 108 cm−2. The gate electrode was fabricated on top of the nano-emitter arrays using a self-aligned polymer mask method. By applying a hot-press step for the polymer planarization, gate–nanotip alignment precision below 10 nm was achieved. Fabricated devices exhibited stable field electron emission with a current density of 0.1 A cm−2, indicating that these are promising for applications that require a miniature high-brightness electron source. |
Formato |
application/pdf |
Identificador |
http://boris.unibe.ch/62357/1/0957-4484_25_8_085203.pdf Mustonen, Anna; Guzenko, Vitaliy; Spreu, Christian; Feurer, Thomas; Tsujino, Soichiro (2014). High-density metallic nano-emitter arrays and their field emission characteristics. Nanotechnology, 25(8), 085203. Institute of Physics Publishing IOP 10.1088/0957-4484/25/8/085203 <http://dx.doi.org/10.1088/0957-4484/25/8/085203> doi:10.7892/boris.62357 info:doi:10.1088/0957-4484/25/8/085203 urn:issn:0957-4484 |
Idioma(s) |
eng |
Publicador |
Institute of Physics Publishing IOP |
Relação |
http://boris.unibe.ch/62357/ |
Direitos |
info:eu-repo/semantics/restrictedAccess |
Fonte |
Mustonen, Anna; Guzenko, Vitaliy; Spreu, Christian; Feurer, Thomas; Tsujino, Soichiro (2014). High-density metallic nano-emitter arrays and their field emission characteristics. Nanotechnology, 25(8), 085203. Institute of Physics Publishing IOP 10.1088/0957-4484/25/8/085203 <http://dx.doi.org/10.1088/0957-4484/25/8/085203> |
Palavras-Chave | #620 Engineering |
Tipo |
info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion PeerReviewed |