High-density metallic nano-emitter arrays and their field emission characteristics


Autoria(s): Mustonen, Anna; Guzenko, Vitaliy; Spreu, Christian; Feurer, Thomas; Tsujino, Soichiro
Data(s)

2014

Resumo

We report the fabrication and field emission properties of high-density nano-emitter arrays with on-chip electron extraction gate electrodes and up to 106 metallic nanotips that have an apex curvature radius of a few nanometers and a the tip density exceeding 108 cm−2. The gate electrode was fabricated on top of the nano-emitter arrays using a self-aligned polymer mask method. By applying a hot-press step for the polymer planarization, gate–nanotip alignment precision below 10 nm was achieved. Fabricated devices exhibited stable field electron emission with a current density of 0.1 A cm−2, indicating that these are promising for applications that require a miniature high-brightness electron source.

Formato

application/pdf

Identificador

http://boris.unibe.ch/62357/1/0957-4484_25_8_085203.pdf

Mustonen, Anna; Guzenko, Vitaliy; Spreu, Christian; Feurer, Thomas; Tsujino, Soichiro (2014). High-density metallic nano-emitter arrays and their field emission characteristics. Nanotechnology, 25(8), 085203. Institute of Physics Publishing IOP 10.1088/0957-4484/25/8/085203 <http://dx.doi.org/10.1088/0957-4484/25/8/085203>

doi:10.7892/boris.62357

info:doi:10.1088/0957-4484/25/8/085203

urn:issn:0957-4484

Idioma(s)

eng

Publicador

Institute of Physics Publishing IOP

Relação

http://boris.unibe.ch/62357/

Direitos

info:eu-repo/semantics/restrictedAccess

Fonte

Mustonen, Anna; Guzenko, Vitaliy; Spreu, Christian; Feurer, Thomas; Tsujino, Soichiro (2014). High-density metallic nano-emitter arrays and their field emission characteristics. Nanotechnology, 25(8), 085203. Institute of Physics Publishing IOP 10.1088/0957-4484/25/8/085203 <http://dx.doi.org/10.1088/0957-4484/25/8/085203>

Palavras-Chave #620 Engineering
Tipo

info:eu-repo/semantics/article

info:eu-repo/semantics/publishedVersion

PeerReviewed