Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin films
| Contribuinte(s) |
Universidade Estadual Paulista (UNESP) |
|---|---|
| Data(s) |
27/05/2014
27/05/2014
01/01/2002
|
| Resumo |
Polymeric precursor solution (Pechini method) was used to deposit LiNbO 3 thin films by spin-coating on (100) silicon substrates. X-ray diffraction data of thin films showed that the increase of oxygen flow promotes a preferred orientation of (001) LiNbO 3 planes parallel to the substrate surface. Surface roughness and grain size, observed by atomic force microscopy, change also with oxygen flow. © 2002 Taylor & Francis. |
| Formato |
33-38 |
| Identificador |
http://dx.doi.org/10.1080/00150190211491 Ferroelectrics, v. 271, p. 33-38. 0015-0193 1563-5112 http://hdl.handle.net/11449/66761 10.1080/00150190211491 2-s2.0-0141943464 |
| Idioma(s) |
eng |
| Relação |
Ferroelectrics |
| Direitos |
closedAccess |
| Palavras-Chave | #Crystallization #LiNbO 3 #Rietveld analysis #LiNbO3 #Oxygen flow #Substrate surface #Atomic force microscopy #Crystalline materials #Flow of fluids #Lithium niobate #Morphology #Oxygen #Silicon #Spin coating #Thin films |
| Tipo |
info:eu-repo/semantics/conferencePaper |
