A Novel Plasma Technique for Surface Treatment: The Plasma Expander
Contribuinte(s) |
Universidade Estadual Paulista (UNESP) |
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Data(s) |
20/05/2014
20/05/2014
01/02/2012
|
Resumo |
Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP) Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq) This paper describes a new plasma treatment method: the plasma expander. In this approach, expanding shock waves are generated in a vacuum chamber by pulsed plasmas. Collisions of fast species in the waves modify the properties of solid surfaces exposed to the plasma. The degree of such modification is governed by the energy delivered by the plasma exposure. To confirm the efficacy of this approach, modifications induced in the properties of thin polymer films produced by plasma-enhanced chemical vapor deposition by exposure to nitrogen plasma shock waves were investigated. The films were prepared from benzene radio frequency plasmas and subsequently exposed to different quantities of nitrogen shock waves N-w. The effects of N-w on the wettability, molecular structure, and mechanical properties of the films were studied. Fourier transform infrared spectroscopy revealed that greater N-w resulted in the loss of C-H groups and the rupture of benzene aromatic rings observed in the structure of the as-deposited films. Furthermore, the contact angle strongly increased and the hardness, evaluated by nanoindentation, increased up to fourfold with the increase in the intensity of the treatment. |
Formato |
492-496 |
Identificador |
http://dx.doi.org/10.1109/TPS.2011.2178272 IEEE Transactions on Plasma Science. Piscataway: IEEE-Inst Electrical Electronics Engineers Inc, v. 40, n. 2, p. 492-496, 2012. 0093-3813 http://hdl.handle.net/11449/40277 10.1109/TPS.2011.2178272 WOS:000300429800011 |
Idioma(s) |
eng |
Publicador |
Institute of Electrical and Electronics Engineers (IEEE) |
Relação |
IEEE Transactions on Plasma Science |
Direitos |
closedAccess |
Palavras-Chave | #Plasma-enhanced chemical vapor deposition (PECVD) #plasma expander #plasma treatment #surface treatment #thin films |
Tipo |
info:eu-repo/semantics/article |