Infrared spectroscopy investigation of various plasma-deposited polymer films irradiated with 170 keV He+ ions
| Contribuinte(s) |
Universidade Estadual Paulista (UNESP) |
|---|---|
| Data(s) |
20/05/2014
20/05/2014
01/08/2006
|
| Resumo |
This work illustrates the advantages of using p-polarized radiation at an incidence angle of 70 degrees in contrast to the conventional unpolarized beam at normal (or near-normal) incidence for the infrared spectroscopic study of polycarbosilane, polysilazane and polysiloxane thin films synthesized by plasma enhanced chemical vapor deposition (PECVD) and subsequently irradiated with 170 keV He+ ions at fluences from 1 x 10(14) to 1 x 10(16) cm(-2). Several bands not seen using the conventional mode could be observed in the polarized mode. (c) 2006 Elsevier B.V. All rights reserved. |
| Formato |
162-166 |
| Identificador |
http://dx.doi.org/10.1016/j.nimb.2006.03.105 Nuclear Instruments & Methods In Physics Research Section B-beam Interactions With Materials and Atoms. Amsterdam: Elsevier B.V., v. 249, p. 162-166, 2006. 0168-583X http://hdl.handle.net/11449/36217 10.1016/j.nimb.2006.03.105 WOS:000239545000042 |
| Idioma(s) |
eng |
| Publicador |
Elsevier B.V. |
| Relação |
Nuclear Instruments & Methods In Physics Research Section B-beam Interactions With Materials and Atoms |
| Direitos |
closedAccess |
| Palavras-Chave | #ion irradiation #Si-based polymer film #plasma polymerization #chemical structure #FTIR |
| Tipo |
info:eu-repo/semantics/article |
