Influence of oxygen flow on crystallization and morphology of LiNbO3 thin films


Autoria(s): Simoes, A. Z.; Gonzalez, A. H.; Zaghete, M. A.; Stojanovic, B. D.; Cavalheiro, A. A.; Moeckli, P.; Setter, N.; Varela, José Arana
Contribuinte(s)

Universidade Estadual Paulista (UNESP)

Data(s)

20/05/2014

20/05/2014

01/01/2002

Resumo

Polymeric precursor solution (Pechini method) was used to deposit LiNbO3 thin films by spin-coating on (100) silicon substrates. X-ray diffraction data of thin films showed that the increase of oxygen flow promotes a preferred orientation of (001) LiNbO3 planes parallel to the substrate surface. Surface roughness and grain size, observed by atomic force microscopy, change also with oxygen flow.

Formato

1623-1628

Identificador

http://dx.doi.org/10.1080/713716163

Ferroelectrics. Abingdon: Taylor & Francis Ltd, v. 271, p. 1623-1628, 2002.

0015-0193

http://hdl.handle.net/11449/25411

10.1080/713716163

WOS:000177216700007

Idioma(s)

eng

Publicador

Taylor & Francis Ltd

Relação

Ferroelectrics

Direitos

closedAccess

Palavras-Chave #crystallization #LiNbO3 #rietveld analysis
Tipo

info:eu-repo/semantics/article