Design and analysis of a low actuation voltage electrowetting-on-dielectric device
Contribuinte(s) |
[Unknown] |
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Data(s) |
01/01/2013
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Resumo |
This paper presents an Electrowetting-on-Dielectric (EWOD) device with optimized insulating layers operated by low actuation voltage. The device consists of an electrode array on a silicon substrate, covered by a dielectric layer and a hydrophobic layer. To characterize the performance of the device, simulations are performed for the dielectric layer of Sio<sub>2</sub> and the hydrophobic layer of Sio<sub>2</sub>, Su-8 and Parylene C at different voltages. The volume finite difference approach of the Coventorware software was used to carry out the simulations. Two different molar of di-ionized water droplet were considered in the simulations. It was observed that the device having the Sio<sub>2</sub> dielectric layer and the Parylene C hydrophobic layer moved the 1M KCL (potassium chloride) droplet at the actuation voltage of 25V. |
Identificador | |
Idioma(s) |
eng |
Publicador |
IEEE |
Relação |
http://dro.deakin.edu.au/eserv/DU:30057168/evid-conficmervwgnl-2013.pdf http://dro.deakin.edu.au/eserv/DU:30057168/samad-designandanalysis-2013.pdf http://doi.org/10.1109/ICCME.2013.6548303 |
Direitos |
2013, IEEE |
Palavras-Chave | #1M KCL #actuation voltage #dielectric layer #electrowetting-on-dielectric #hydrophobic layer |
Tipo |
Conference Paper |