Low actuation-voltage shift in MEMS switch using ramp dual-pulse
Data(s) |
01/01/2012
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Resumo |
This paper proposes a ramp dual-pulse actuation-voltage waveform that reduces actuation-voltage shift in capacitive microelectromechanical system (MEMS) switches. The proposed waveform as well as two reported waveforms (dual pulse, and novel dual-pulse) are analyzed using equivalent-circuit and equation models. Based on the analysis outcome, the paper provides a clear understanding of trapped charge density in the dielectric. The results show that the proposed actuation-voltage waveform successfully reduces trapped charge and increases lifetime due to lowering of actuation-voltage shift. Using the proposed actuation-voltage waveform, the membrane reaches a steady state on the electrode faster.<br /> |
Identificador | |
Idioma(s) |
eng |
Publicador |
Denshi Jouhou Tsuushin Gakkai (Institute of Electronics Information and Communication Engineers) |
Relação |
http://dro.deakin.edu.au/eserv/DU:30046894/mafinejad-lowactuation-2012.pdf http://hdl.handle.net/10.1587/elex.9.1062 |
Direitos |
2012, The Authors |
Palavras-Chave | #actuation #charging #dielectric #lifetime #MEMS |
Tipo |
Journal Article |