Design and simulation of a tunable MEMS filter for wireless biomedical signal transceivers

This paper presents a new architecture for a high quality tunable MEMS filter that can be used in wireless biomedical signal transceivers. It consists of a π match circuit with two shunt capacitive coupling switches separated by a piece of high impedance short transmission line, and also a series switch placed at the quarter wavelength distance away from the π match circuit. The low actuation voltage and also tunability are important features of the design objective. All portions of the filter can be realized simultaneously. Thus, the filter docs not require any extra steps during its fabrication, and is not costly. The simulation results confirm the good performance of the filter.<br />