Effect of microstructure on surface roughness of micro-scale metallic components fabricated by focused Ion beam

---

Autoria(s): Hosokawa, H.; Shimojima, K.; Chino, Y.; Yamada, Y.; Wen, C.E.; Mabuchi, M.

Data(s)	01/01/2002
Identificador	http://hdl.handle.net/10536/DRO/DU:30026231
Idioma(s)	eng
Publicador	Werkstoff-Informationsges
Direitos	2002, Werkstoff-Informationsges
Tipo	Conference Paper