Confecção de um perfurador de lamínulas de vidro por corrosão ácida


Autoria(s): Silva,Heron Dominguez Torres da; Lago,Claudimir Lucio do
Data(s)

01/03/2003

Resumo

A simple device for glass plate drilling, which is an important step in microfabrication procedures, is described. A reservoir of concentrated hydrofluoric acid with a hole in its bottom is affixed against the glass plate. Leakage is prevented by using a neoprene O-ring. A plastic pipet tip inserted in the reservoir, close to the corrosion region, provides forced convection by pressure variations inside it. A device to make 5 simultaneous holes in a plate is also presented. For a 140 µm thickness alkaline glass lamina and 1/8" O-ring, 5 holes are drilled in 20 min.

Formato

text/html

Identificador

http://www.scielo.br/scielo.php?script=sci_arttext&pid=S0100-40422003000200022

Idioma(s)

pt

Publicador

Sociedade Brasileira de Química

Fonte

Química Nova v.26 n.2 2003

Palavras-Chave #microfabrication #micro total analysis system #drilling #glass plate
Tipo

journal article