Phase-modulated ellipsometer using a Fourier transform infrared spectrometer for real time applications
| Contribuinte(s) |
Universitat de Barcelona |
|---|---|
| Data(s) |
08/05/2012
|
| Identificador | |
| Idioma(s) |
eng |
| Publicador |
American Institute of Physics |
| Direitos |
(c) American Institute of Physics 1993 info:eu-repo/semantics/openAccess |
| Palavras-Chave | #El·lipsometria #Fourier transformations #Espectroscòpia infraroja #Pel·lícules fines #Ellipsometry #Fourier transformations #Infrared spectroscopy #Thin films |
| Tipo |
info:eu-repo/semantics/article |
