Plasma parameters of pulsed-dc discharges in methane used to deposit diamondlike carbon films
| Contribuinte(s) |
Universitat de Barcelona |
|---|---|
| Data(s) |
07/05/2012
|
| Identificador | |
| Idioma(s) |
eng |
| Publicador |
American Institute of Physics |
| Direitos |
(c) American Institute of Physics, 2009 info:eu-repo/semantics/openAccess |
| Palavras-Chave | #Metà #Electrons #Pel·lícules fines #Revestiments protectors #Aplicacions industrials #Plasma (Gasos ionitzats) #Methane #Electrons #Thin films #Protective coatings #Industrial applications #Plasma (Ionized gases) |
| Tipo |
info:eu-repo/semantics/article |
