Ultrafine particles produced by plasma enhanced chemical vapor deposition -from SiH4, CH4, NH3 and B2H6 gas mixtures- for nanostructured ceramics applications

Autoria(s): Bertrán Serra, Enric; Costa i Balanzat, Josep; Viera Mármol, Gregorio; Andújar Bella, José Luis; Canillas i Biosca, Adolf; Pascual Miralles, Esther
Contribuinte(s)

Universitat de Barcelona
Data(s)

19/03/2012
Identificador

http://hdl.handle.net/2445/22753
Idioma(s)

eng
Publicador

Institut d'Estudis Catalans
Direitos

cc-by (c) Bertrán Serra et al., 1999

<a href="http://creativecommons.org/licenses/by/3.0/es">http://creativecommons.org/licenses/by/3.0/es</a>
Palavras-Chave #Silici #Nanopartícules #Materials nanoestructurals #Silicon #Nanoparticles #Nanostructured materials
Tipo

info:eu-repo/semantics/article
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