Ion-beam synthesis of amorphous SiC films: Structural analysis and recrystallization

Autoria(s): Serre, Christophe; Calvo Barrio, Lorenzo; Pérez Rodríguez, Alejandro; Romano Rodríguez, Alberto; Morante i Lleonart, Joan Ramon; Pacaud, Y.; Kögler, Reinhard; Heera, Viton; Skorupa, Wolfgang
Contribuinte(s)

Universitat de Barcelona
Data(s)

02/05/2012
Identificador

http://hdl.handle.net/2445/24744
Idioma(s)

eng
Publicador

American Institute of Physics
Direitos

(c) American Institute of Physics, 1996

info:eu-repo/semantics/openAccess
Palavras-Chave #Implantació d'ions #Silici #Ion implantation #Silicon
Tipo

info:eu-repo/semantics/article
Acesso ao item digital