Force-balance interface circuit based on floating MOSFET capacitors for micro-machined capacitive accelerometers
| Contribuinte(s) |
Universitat de Barcelona |
|---|---|
| Data(s) |
04/05/2010
|
| Identificador | |
| Idioma(s) |
eng |
| Publicador |
IEEE |
| Direitos |
(c) IEEE, 2006 info:eu-repo/semantics/openAccess |
| Palavras-Chave | #Circuits integrats #Microelectrònica #Detectors #CMOS integrated circuits #MOSFET circuits #Accelerometers #Capacitive sensors #Delta-sigma modulation #Micromachining #Microsensors #Switched capacitor networks |
| Tipo |
info:eu-repo/semantics/article |
