Anodic porous alumina structural characteristics study based on SEM image processing and analysis
Contribuinte(s) |
UNIVERSIDADE DE SÃO PAULO |
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Data(s) |
18/10/2012
18/10/2012
2009
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Resumo |
The present work reports the porous alumina structures fabrication and their quantitative structural characteristics study based on mathematical morphology analysis by using the SEM images. The algorithm used in this work was implemented in 6.2 MATLAB software. Using the algorithm it was possible to obtain the distribution of maximum, minimum and average radius of the pores in porous alumina structures. Additionally, with the calculus of the area occupied by the pores, it was possible to obtain the porosity of the structures. The quantitative results could be obtained and related to the process fabrication characteristics, showing to be reliable and promising to be used to control the pores formation process. Then, this technique could provide a more accurate determination of pore sizes and pores distribution. (C) 2008 Elsevier Ltd. All rights reserved. |
Identificador |
MICROELECTRONICS JOURNAL, v.40, n.4/Mai, p.844-847, 2009 0026-2692 http://producao.usp.br/handle/BDPI/18837 10.1016/j.mejo.2008.11.024 |
Idioma(s) |
eng |
Publicador |
ELSEVIER SCI LTD |
Relação |
Microelectronics Journal |
Direitos |
restrictedAccess Copyright ELSEVIER SCI LTD |
Palavras-Chave | #Mathematical morphology analysis #Anodic porous alumina structures #SEM images #Engineering, Electrical & Electronic #Nanoscience & Nanotechnology |
Tipo |
article original article publishedVersion |