Anodic porous alumina structural characteristics study based on SEM image processing and analysis


Autoria(s): Raimundo, Daniel Scodeler; Calíope, Priscila Braga; Huanca, Danilo Roque; Salcedo, Walter Jaimes
Contribuinte(s)

UNIVERSIDADE DE SÃO PAULO

Data(s)

18/10/2012

18/10/2012

2009

Resumo

The present work reports the porous alumina structures fabrication and their quantitative structural characteristics study based on mathematical morphology analysis by using the SEM images. The algorithm used in this work was implemented in 6.2 MATLAB software. Using the algorithm it was possible to obtain the distribution of maximum, minimum and average radius of the pores in porous alumina structures. Additionally, with the calculus of the area occupied by the pores, it was possible to obtain the porosity of the structures. The quantitative results could be obtained and related to the process fabrication characteristics, showing to be reliable and promising to be used to control the pores formation process. Then, this technique could provide a more accurate determination of pore sizes and pores distribution. (C) 2008 Elsevier Ltd. All rights reserved.

Identificador

MICROELECTRONICS JOURNAL, v.40, n.4/Mai, p.844-847, 2009

0026-2692

http://producao.usp.br/handle/BDPI/18837

10.1016/j.mejo.2008.11.024

http://dx.doi.org/10.1016/j.mejo.2008.11.024

Idioma(s)

eng

Publicador

ELSEVIER SCI LTD

Relação

Microelectronics Journal

Direitos

restrictedAccess

Copyright ELSEVIER SCI LTD

Palavras-Chave #Mathematical morphology analysis #Anodic porous alumina structures #SEM images #Engineering, Electrical & Electronic #Nanoscience & Nanotechnology
Tipo

article

original article

publishedVersion