Micro-Raman spectroscopic study of two-dimensional stress distribution in poly-Si induced by CoSi2 patterns

Autoria(s): Li, Bibo; Huang, Fumin; Zhang, Shulin
Data(s)

1998
Identificador

http://pure.qub.ac.uk/portal/en/publications/microraman-spectroscopic-study-of-twodimensional-stress-distribution-in-polysi-induced-by-cosi2-patterns(4365c713-1e86-421d-aaf9-9dbc5b8925e6).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Li , B , Huang , F & Zhang , S 1998 , ' Micro-Raman spectroscopic study of two-dimensional stress distribution in poly-Si induced by CoSi2 patterns ' Semiconductor Science and Technology , vol 13 , no. 6 .
Tipo

article
Acesso ao item digital