Plasma Etch Phase Transition Detection Using Optical Emission Spectroscopy

Autoria(s): Ma, Beibei; McLoone, Seán; Ringwood, John; MacGearailt, N.; McGrath, M.; Kilally, A.
Data(s)

2006
Identificador

http://pure.qub.ac.uk/portal/en/publications/plasma-etch-phase-transition-detection-using-optical-emission-spectroscopy(87531fa6-6ed6-414a-97c3-a1ad56d545a7).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Ma , B , McLoone , S , Ringwood , J , MacGearailt , N , McGrath , M & Kilally , A 2006 , ' Plasma Etch Phase Transition Detection Using Optical Emission Spectroscopy ' Intel Ireland Research Conference , Leixlip , Ireland , 04/09/2006 - 05/09/2006 , pp. 40 .
Tipo

conferenceObject
Acesso ao item digital