Plasma Etch Variation Detection by Principal Component Analysis of OES Data

Autoria(s): Ma, Beibei; McLoone, Seán; Ringwood, John; MacGearailt, N.
Data(s)

2007
Identificador

http://pure.qub.ac.uk/portal/en/publications/plasma-etch-variation-detection-by-principal-component-analysis-of-oes-data(51fac243-6e95-47e4-afe8-e3800c7b605a).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Ma , B , McLoone , S , Ringwood , J & MacGearailt , N 2007 , ' Plasma Etch Variation Detection by Principal Component Analysis of OES Data ' 4th Intel Ireland Research Conference and Raman Workshop , Leixlip , Ireland , 10/09/2007 - 12/09/2007 , pp. 44 .
Tipo

conferenceObject
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