Virtual Metrology for Plasma Etching

Autoria(s): Lynn, S.; Ringwood, John; MacGearailt, N.; Ragnoli, Emanuele; McLoone, Seán
Data(s)

2008
Identificador

http://pure.qub.ac.uk/portal/en/publications/virtual-metrology-for-plasma-etching(77c59eea-b945-4986-8c10-ddb21a61220a).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Lynn , S , Ringwood , J , MacGearailt , N , Ragnoli , E & McLoone , S 2008 , ' Virtual Metrology for Plasma Etching ' Intel European Research and Innovation Conference , Leixlip , Ireland , 10/09/2008 - 12/09/2008 , pp. 49 .
Tipo

conferenceObject
Acesso ao item digital