A dynamic sampling methodology for multi-site wafer metrology

Autoria(s): Prakash, P. K S; Honari, Bahman; Johnston, A.; McLoone, Seán
Data(s)

2012
Identificador

http://pure.qub.ac.uk/portal/en/publications/a-dynamic-sampling-methodology-for-multisite-wafer-metrology(bf9c1b1f-ff7b-4ae9-b1bf-e6eda0df23f6).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Prakash , P K S , Honari , B , Johnston , A & McLoone , S 2012 , ' A dynamic sampling methodology for multi-site wafer metrology ' The European Advanced Process Control and Manufacturing (APCM) Conference , Grenoble , France , 16/04/2012 - 19/04/2012 , .
Tipo

conferenceObject
Acesso ao item digital