Virtual metrology reconstruction of dynamically sampled wafers

Autoria(s): McLoone, Seán; Johnston, A.B.
Data(s)

2012
Identificador

http://pure.qub.ac.uk/portal/en/publications/virtual-metrology-reconstruction-of-dynamically-sampled-wafers(ca8dff11-68ec-4361-afff-93574c45c208).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

McLoone , S & Johnston , A B 2012 , ' Virtual metrology reconstruction of dynamically sampled wafers ' Intel Ireland Research Conference (ERIC 2012) , Dublin , Ireland , 03/10/2012 - 04/10/2012 , pp. 85 .
Tipo

conferenceObject
Acesso ao item digital