Tracking plasma etch process variations using Principal Component Analysis of OES data

Autoria(s): Ma, B.; McLoone, Seán; Ringwood, J.
Data(s)

2007
Identificador

http://pure.qub.ac.uk/portal/en/publications/tracking-plasma-etch-process-variations-using-principal-component-analysis-of-oes-data(6c456b1f-edb3-4a67-b76a-97b9ce875cca).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Ma , B , McLoone , S & Ringwood , J 2007 , ' Tracking plasma etch process variations using Principal Component Analysis of OES data ' Paper presented at International Conference on Informatics in Control, Automation and Robotics (ICINCO 2007) , Angers , France , 09/05/2007 - 12/05/2007 , .
Tipo

conferenceObject
Acesso ao item digital