Automatic Control and Machine Learning for Semiconductor Manufacturing:Review and Challenges

Autoria(s): Susto, Gian Antonio; Pampuri, Simone; Schirru, Andrea; De Nicolao, Giuseppe; McLoone, Seán
Data(s)

2012
Identificador

http://pure.qub.ac.uk/portal/en/publications/automatic-control-and-machine-learning-for-semiconductor-manufacturing(f835af98-3d40-41ca-b33b-0f6d49371560).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Susto , G A , Pampuri , S , Schirru , A , De Nicolao , G & McLoone , S 2012 , ' Automatic Control and Machine Learning for Semiconductor Manufacturing : Review and Challenges ' Paper presented at 10th European Workshop on Advanced Control and Diagnosis 2012 , Copenhagen , Denmark , 08/10/2012 - 09/10/2012 , .
Tipo

conferenceObject
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