Optimization of the uniaxial nature of strain on cantilever for MOSFET sensors

Autoria(s): Wang, Yao; Armstrong, Mervyn; Mitchell, Neil
Data(s)

09/09/2012
Identificador

http://pure.qub.ac.uk/portal/en/publications/optimization-of-the-uniaxial-nature-of-strain-on-cantilever-for-mosfet-sensors(dbb84370-2170-4b8f-9251-50fdb88d0d16).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Wang , Y , Armstrong , M & Mitchell , N 2012 , ' Optimization of the uniaxial nature of strain on cantilever for MOSFET sensors ' 23rd Micromechanics and Microsystems Europe , Ilmenau , Germany , 09/09/2012 , .
Tipo

conferenceObject
Acesso ao item digital