Characterization of Rapid Melt Growth (RMG) Process for High Quality Thin Film Germanium on Insulator
Data(s) |
01/04/2012
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Identificador | |
Idioma(s) |
eng |
Direitos |
info:eu-repo/semantics/restrictedAccess |
Fonte |
Zainal , N , Mitchell , N , McNeill , D , Bain , M , Armstrong , M , Baine , P , Adley , D & Perova , T S 2012 , ' Characterization of Rapid Melt Growth (RMG) Process for High Quality Thin Film Germanium on Insulator ' ECS Transactions , vol 45 , pp. 169-180 . DOI: 10.1149/1.3700467 |
Tipo |
article |