ION SURFACE INTERACTIONS IN THE STUDY OF DRY ETCHING

Autoria(s): Mckinley, A.; Graham, Bill
Data(s)

1986
Identificador

http://pure.qub.ac.uk/portal/en/publications/ion-surface-interactions-in-the-study-of-dry-etching(59e8d3c7-4ca9-4299-8322-e766e9b440a3).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Mckinley , A & Graham , B 1986 , ' ION SURFACE INTERACTIONS IN THE STUDY OF DRY ETCHING ' Vacuum , vol 36 , pp. 1021-1021 .
Tipo

article
Acesso ao item digital