TIME-RESOLVED PLASMA PARAMETER MEASUREMENTS IN A LOW-FREQUENCY RF GLOW-DISCHARGE


Autoria(s): Anderson, C.A.; Graham, Bill; Hopkins, M.B.
Data(s)

1988

Identificador

http://pure.qub.ac.uk/portal/en/publications/timeresolved-plasma-parameter-measurements-in-a-lowfrequency-rf-glowdischarge(21f311eb-7523-4b4f-b1e3-933770aff005).html

Idioma(s)

eng

Direitos

info:eu-repo/semantics/restrictedAccess

Fonte

Anderson , C A , Graham , B & Hopkins , M B 1988 , ' TIME-RESOLVED PLASMA PARAMETER MEASUREMENTS IN A LOW-FREQUENCY RF GLOW-DISCHARGE ' Applied Physics Letters , vol 52 , pp. 783-785 .

Tipo

article