CORRELATION OF MOLECULAR-HYDROGEN DISSOCIATION AND THE FILM QUALITY OF DIAMOND-LIKE CARBON IN PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION

Autoria(s): Cheshire, R.C.; Graham, Bill; Morrow, Thomas; Kornas, V.; Dobele, H.F.; Donnelly, K.; Dowling, D.P.; Obrien, T.P.
Data(s)

1995
Identificador

http://pure.qub.ac.uk/portal/en/publications/correlation-of-molecularhydrogen-dissociation-and-the-film-quality-of-diamondlike-carbon-in-plasmaenhanced-chemicalvapordeposition(c01b2a46-e0dd-4cef-84f3-e53dda60c5ec).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Cheshire , R C , Graham , B , Morrow , T , Kornas , V , Dobele , H F , Donnelly , K , Dowling , D P & Obrien , T P 1995 , ' CORRELATION OF MOLECULAR-HYDROGEN DISSOCIATION AND THE FILM QUALITY OF DIAMOND-LIKE CARBON IN PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION ' Applied Physics Letters , vol 66 , pp. 3152-3154 .
Tipo

article
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