Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy
| Data(s) |
1999
|
|---|---|
| Resumo |
It is demonstrated that spatio-temporally resolved emission studies of a capacitively coupled gaseous electronics conference reference cell discharge can be used to determine changes in the heating mechanisms in such discharges. |
| Identificador | |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Mahony , C M O & Graham , B 1999 , ' Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy ' IEEE Transactions on Plasma Science , vol 27 , no. 1 , pp. 72-73 . |
| Palavras-Chave | #/dk/atira/pure/subjectarea/asjc/3100 #Physics and Astronomy(all) #/dk/atira/pure/subjectarea/asjc/3100/3104 #Condensed Matter Physics |
| Tipo |
article |
