Silicon carbide layers produced by rapid thermal CVD

Autoria(s): Ruddell, Fred; McNeill, David; Armstrong, Mervyn; Gamble, Harold
Data(s)

01/10/1990
Identificador

http://pure.qub.ac.uk/portal/en/publications/silicon-carbide-layers-produced-by-rapid-thermal-cvd(0b3c5411-a071-42fb-8c22-2f069062f143).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Ruddell , F , McNeill , D , Armstrong , M & Gamble , H 1990 , ' Silicon carbide layers produced by rapid thermal CVD ' Paper presented at Proceedings of SPIE , Aachen , Germany , 01/10/1990 - 01/10/1990 , pp. 159-170 .
Tipo

conferenceObject
Acesso ao item digital