Low temperature epitaxial silicon growth in a rapid thermal processor

Autoria(s): McNeill, David; Gamble, Harold; Armstrong, Mervyn
Data(s)

01/05/1991
Identificador

http://pure.qub.ac.uk/portal/en/publications/low-temperature-epitaxial-silicon-growth-in-a-rapid-thermal-processor(9cb5e6a0-a713-4590-aa3b-ef530ae32400).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

McNeill , D , Gamble , H & Armstrong , M 1991 , ' Low temperature epitaxial silicon growth in a rapid thermal processor ' Paper presented at MRS Symposium Proceedings , Anaheim, California , United States , 01/05/1991 - 01/05/1991 , pp. 235-240 .
Tipo

conferenceObject
Acesso ao item digital