Growth of multi-layer Si/Si1-xGex structures using rapid thermal chemical vapour deposition

Autoria(s): McNeill, David; Armstrong, Mervyn; Gamble, Harold
Data(s)

01/12/1993
Identificador

http://pure.qub.ac.uk/portal/en/publications/growth-of-multilayer-sisi1xgex-structures-using-rapid-thermal-chemical-vapour-deposition(89a746e6-b559-4028-b6b7-635e52865b59).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

McNeill , D , Armstrong , M & Gamble , H 1993 , ' Growth of multi-layer Si/Si1-xGex structures using rapid thermal chemical vapour deposition ' Paper presented at MRS Symposium Proceedings , Boston , United States , 01/12/1993 - 01/12/1993 , pp. 187-192 .
Tipo

conferenceObject
Acesso ao item digital