The effects of deposition conditions on micro-structure in polycrystalline silicon-germanium thin films: fractal characterisation using scanning probe microscopy
Data(s) |
01/12/1996
|
---|---|
Identificador | |
Idioma(s) |
eng |
Direitos |
info:eu-repo/semantics/restrictedAccess |
Fonte |
Campbell , P A , Walmsley , D G , Gay , D L , Chong , R L F , Gamble , H & McNeill , D 1996 , ' The effects of deposition conditions on micro-structure in polycrystalline silicon-germanium thin films: fractal characterisation using scanning probe microscopy ' Paper presented at IOP Condensed Matter & Materials Physics Conference , York , United Kingdom , 01/12/1996 - 01/12/1996 , pp. 0-0 . |
Tipo |
conferenceObject |