Investigation of p-type contamination in thin SOI layers during fabrication
| Data(s) |
01/04/1999
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|---|---|
| Identificador | |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Uppal , S , Gay , D L , Armstrong , A , McNeill , D , Baine , P , Armstrong , M , Gamble , H & Yallop , K 1999 , ' Investigation of p-type contamination in thin SOI layers during fabrication ' Paper presented at MRS '99 Spring Meeting , San Francisco , United States , 01/04/1999 - 01/04/1999 , pp. 0-0 . |
| Tipo |
conferenceObject |
