Electrical characterisation of ALD Al2O3 and HfO2 films on germanium

Autoria(s): Tantraviwat, D.; Low, Yee; Baine, Paul; Mitchell, Neil; McNeill, David; Armstrong, Mervyn; Gamble, Harold
Data(s)

01/12/2009
Identificador

http://pure.qub.ac.uk/portal/en/publications/electrical-characterisation-of-ald-al2o3-and-hfo2-films-on-germanium(140c0a33-32da-45cd-af7c-2bfe40e9e583).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Tantraviwat , D , Low , Y , Baine , P , Mitchell , N , McNeill , D , Armstrong , M & Gamble , H 2009 , ' Electrical characterisation of ALD Al2O3 and HfO2 films on germanium ' Paper presented at Materials Ireland Conference , Cork , Ireland , 01/12/2009 - 01/12/2009 , pp. 0-0 .
Tipo

conferenceObject
Acesso ao item digital