Hydrogen and helium implantation in germanium for layer transfer applications


Autoria(s): Rainey, Paul; Low, Y.W.; Hurley, Richard; Baine, Paul; McNeill, David; Mitchell, Neil; Gamble, Harold; Armstrong, Mervyn
Data(s)

01/12/2009

Identificador

http://pure.qub.ac.uk/portal/en/publications/hydrogen-and-helium-implantation-in-germanium-for-layer-transfer-applications(f7474841-415b-4c55-bb8b-a56cfaf75e5f).html

Idioma(s)

eng

Direitos

info:eu-repo/semantics/restrictedAccess

Fonte

Rainey , P , Low , Y W , Hurley , R , Baine , P , McNeill , D , Mitchell , N , Gamble , H & Armstrong , M 2009 , ' Hydrogen and helium implantation in germanium for layer transfer applications ' Paper presented at Materials Ireland Conference , Cork , Ireland , 01/12/2009 - 01/12/2009 , pp. 0-0 .

Tipo

conferenceObject