Rapid thermal processing of polysilicon emitter bipolar transistors in a combined CMOS/bipolar process

Autoria(s): Grant, L.A.; McNeill, David; Blomley, P.F.
Data(s)

01/09/1987
Identificador

http://pure.qub.ac.uk/portal/en/publications/rapid-thermal-processing-of-polysilicon-emitter-bipolar-transistors-in-a-combined-cmosbipolar-process(965d902e-1158-49dd-b24a-809f225e9457).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Grant , L A , McNeill , D & Blomley , P F 1987 , ' Rapid thermal processing of polysilicon emitter bipolar transistors in a combined CMOS/bipolar process ' Paper presented at Proceedings of 17th European Solid State Device Research Conference, ESSDERC '87 , Bologna , Italy , 01/09/1987 - 01/09/1987 , pp. 207-209 .
Tipo

conferenceObject
Acesso ao item digital