An evaluation of the effects of benzotriazole in NH4OH slurry for copper CMP
| Data(s) |
01/04/2000
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|---|---|
| Identificador |
http://www.scopus.com/inward/record.url?scp=0034433367&partnerID=8YFLogxK |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Len , V S C , McNeill , D & Gamble , H 2000 , ' An evaluation of the effects of benzotriazole in NH4OH slurry for copper CMP ' Paper presented at MRS Symposium Proceedings , San Francisco , United States , 01/04/2000 - 01/04/2000 , pp. E7.4.1-E7.4.6 . |
| Tipo |
conferenceObject |
