Optimisation of tungsten disilicide dopant diffusion conduits for SSOI applications

Autoria(s): Liao, S.; Bain, Michael; Baine, Paul; McNeill, David; Armstrong, Mervyn; Gamble, Harold
Data(s)

01/01/2009
Identificador

http://pure.qub.ac.uk/portal/en/publications/optimisation-of-tungsten-disilicide-dopant-diffusion-conduits-for-ssoi-applications(40e07c2a-88a8-47f0-97bd-1a43282460ee).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Liao , S , Bain , M , Baine , P , McNeill , D , Armstrong , M & Gamble , H 2009 , ' Optimisation of tungsten disilicide dopant diffusion conduits for SSOI applications ' Paper presented at Proceedings of EuroSOI 2009 , Goteborg , Sweden , 01/01/2009 - 01/01/2009 , pp. 83-84 .
Tipo

conferenceObject
Acesso ao item digital