A rapid thermal processing system for the deposition of silicon carbide layers on silicon

Autoria(s): Montgomery, John; Ruddell, Fred; McNeill, David; Armstrong, Mervyn; Gamble, Harold
Data(s)

1996
Identificador

http://pure.qub.ac.uk/portal/en/publications/a-rapid-thermal-processing-system-for-the-deposition-of-silicon-carbide-layers-on-silicon(358747b1-e484-498c-a3e4-5423f5e375e5).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Montgomery , J , Ruddell , F , McNeill , D , Armstrong , M & Gamble , H 1996 , ' A rapid thermal processing system for the deposition of silicon carbide layers on silicon ' International Journal of Materials & Product Technology , vol 11(1-2) , pp. 166-177 .
Tipo

article
Acesso ao item digital