Manufacturing processes for WSi2-GPSOI substrates and their influence on cross-talk suppression and inductance
Data(s) |
01/04/2003
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Identificador |
http://www.scopus.com/inward/record.url?scp=3042696436&partnerID=8YFLogxK |
Idioma(s) |
eng |
Direitos |
info:eu-repo/semantics/restrictedAccess |
Fonte |
Baine , P , Gamble , H , Armstrong , M , Bain , M , McNeill , D , Hamel , J , Stefanos , S & Kraft , M 2003 , ' Manufacturing processes for WSi2-GPSOI substrates and their influence on cross-talk suppression and inductance ' Paper presented at 7th International Symposium on Semiconductor Wafer Bonding , Paris , France , 01/04/2003 - 01/04/2003 , . |
Tipo |
conferenceObject |