Investigation of the role of chemical-mechanical polishing in improving the performance of polysilicon TFTs

Autoria(s): Lee, B; Quinn, L; Baine, Paul; Mitchell, Neil; Armstrong, Mervyn; Gamble, Harold
Data(s)

01/04/1999
Identificador

http://pure.qub.ac.uk/portal/en/publications/investigation-of-the-role-of-chemicalmechanical-polishing-in-improving-the-performance-of-polysilicon-tfts(741a7562-cfe4-4db2-a937-53d267c8c91e).html

http://www.scopus.com/inward/record.url?scp=0033719993&partnerID=8YFLogxK
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Lee , B , Quinn , L , Baine , P , Mitchell , N , Armstrong , M & Gamble , H 1999 , ' Investigation of the role of chemical-mechanical polishing in improving the performance of polysilicon TFTs ' Paper presented at Symposium on Flat-Panel Displays and Sensors-Principles, Materials and Processes held at the 1999 MRS Spring Meeting , San Francisco , United States , 01/04/2000 - 01/04/2000 , pp. 257-262 .
Tipo

conferenceObject
Acesso ao item digital