Production of silicon diaphragms by precision grinding
| Data(s) |
01/09/2000
|
|---|---|
| Identificador |
http://www.scopus.com/inward/record.url?scp=0034546872&partnerID=8YFLogxK |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Prochaska , A , Baine , P , Mitchell , N & Gamble , H 2000 , ' Production of silicon diaphragms by precision grinding ' Paper presented at Conference on Micromachining and Microfabrication Process Technology VI , Santa Clara, Ca , United States , 01/09/2000 - 01/09/2000 , pp. 244-255 . |
| Tipo |
conferenceObject |
