Silicon-on-insulator substrates with buried tungsten silicide layer

Autoria(s): Gamble, Harold; Armstrong, Mervyn; Baine, Paul; Bain, Michael; McNeill, David
Data(s)

01/10/2001
Identificador

http://pure.qub.ac.uk/portal/en/publications/silicononinsulator-substrates-with-buried-tungsten-silicide-layer(53be6b17-531c-44d9-8070-b8c6858a91ee).html

http://www.scopus.com/inward/record.url?scp=0035335811&partnerID=8YFLogxK
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Gamble , H , Armstrong , M , Baine , P , Bain , M & McNeill , D 2001 , ' Silicon-on-insulator substrates with buried tungsten silicide layer ' Paper presented at European Meeting on Silicon-on-Insulator Devices (EUROSOI-2000) , Granada , Spain , 01/10/2001 - 01/10/2001 , .
Tipo

conferenceObject
Acesso ao item digital